FIB / SEM Quanta 3D 200i system with sample preparation equipment
Types scanning electron microscopy of analysis:
- Obtaining SEM images of cross section structures and the surface of nanostructured thin object (conductive or nonconductive), including thin films, coatings, nanochips electrolyte and electrode structures with a spatial resolution down to 1 nm.
- Image analysis to afford quantitative data about the size of the layers, the size and shape of nanocrystals (granules), intercrystallite boundaries, inter-layer interfaces and other features of the structure.
- Application of the methods of preparation of nanostructured thin objects for TEM.
FIB / SEM Quanta 3D 200i system with sample preparation equipment:
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