Time of flight secondary ion mass spectrometer IONTOF SIMS5

Types of SIMS analysis:

• Fiberwise analysis of the elementary surface layers of nanomaterials and
  nanostructures by means of secondary ion mass spectrometry, including:
  • fiberwise analysis of the functional elements of integrated circuit;
  • fiberwise analysis of superlattices;
  • dose control of doping impurities in semiconductors and semiconductor-based structures.
• Quantitative elementary analysis of nanomaterials under the various methods of ion mass spectrometry.
• Physical and chemical analysis of less than 0.1 micrometer sized particles.
• Three-dimensional analysis of the distribution of the elements.
• Investigation of impurities and defects in crystals and minerals.
• Physical and chemical analysis of bio-organic nano-objects.
• Quantitative microanalysis for geology and ecology.